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Basics: what is Green ICT?
Lifecycle assessment of smartphone
TV consumption calculator
Best Practice Energiemanagement
Green ICT @ FMD Reference Data
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Microelectronics production
[x]
Communication infrastructures
Data on the carbon footprint
[0]
Measured data on energy consumption
[2]
Microelectronics production
CO₂ balancing of a production process
[3]
Saving on chemicals
[1]
Saving of gases
[1]
Saving energy in the cleanroom infrastructure
[3]
Substitution of chemicals
[3]
Sensor edge cloud systems
Energy self-sufficient wireless sensor
[3]
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Data sets:
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Energy supply for cleanrooms: PV system (variation of battery parameters)
Energy supply for cleanrooms: peak load reduction
Energy supply for clean rooms: PV system (variation of PV output)
Green stripper for photoresist removal (TMAH replacement)
D-BOS 390 as replacement for EKC265 at TSV Post Etch Cleaning
Photoresist-free, semi-additive manufacturing process for flex (film) conductor tracks
TC-CA25 as a replacement for EKC265 as a metal post-etch for wafer cleaning
Replacement of critical etching chemicals (TMAH)
Photoresist-based semi-additive manufacturing process for flex (film) conductor tracks
Optimization of NF3 chamber cleaning of a PECVD system
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