Competence center for sustainable IT and communication technology
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Green ICT @ FMD Reference Data

Filter: Substitution of chemicals [x]

Communication infrastructures

  • Data on the carbon footprint[0]
  • Measured data on energy consumption[2]

Microelectronics production

  • CO₂ balancing of a production process[3]
  • Saving on chemicals[1]
  • Saving of gases[1]
  • Saving energy in the cleanroom infrastructure[3]
  • Substitution of chemicals[3]

Sensor edge cloud systems

  • Energy self-sufficient wireless sensor[3]

Search:

Data sets: 3 Hits

Green stripper for photoresist removal (TMAH replacement)
D-BOS 390 as replacement for EKC265 at TSV Post Etch Cleaning
Replacement of critical etching chemicals (TMAH)
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