DRIE

Increasing the sustainability of semiconductor manufacturing processes

Fraunhofer EMFT – Around 80 % of the CO2 footprint of average electronic components is already caused during production. A research team at the Fraunhofer EMFT is working on optimizing processes in semiconductor production in order to minimize the use of climate-damaging process gases. In the process, the scientists are also testing more climate-friendly alternatives to etching gases that have been used as standard to date.