Green ICT @ FMD Reference Data
Filter: Substitution of chemicals [x]
Communication infrastructures
Microelectronics production
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Data sets: 3 Hits
| Green stripper for photoresist removal (TMAH replacement) |
| D-BOS 390 as replacement for EKC265 at TSV Post Etch Cleaning |
| Replacement of critical etching chemicals (TMAH) |