Competence center for sustainable IT and communication technology
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Green ICT @ FMD Reference Data

Filter: Saving of gases [x]

Communication infrastructures

  • Energieeinsparung bei Servern[1]
  • Measured data on energy consumption[5]

Microelectronics production

  • CO₂-Bilanz eines Fertigungsprozesses[4]
  • Saving on chemicals[1]
  • Saving of gases[1]
  • Saving energy in the cleanroom infrastructure[3]
  • Substitution of chemicals[3]

Sensor edge cloud systems

  • CO₂-Bilanz von Sensoren-Modulen-Systemen[7]

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Data sets: 1 Hits

Optimization of NF3 chamber cleaning of a PECVD system
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