Competence center for sustainable IT and communication technology
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Green ICT @ FMD Reference Data

Filter: Saving of gases [x]

Communication infrastructures

  • Measured data on energy consumption[3]

Microelectronics production

  • CO₂ balancing of a production process[3]
  • Saving on chemicals[1]
  • Saving of gases[1]
  • Saving energy in the cleanroom infrastructure[3]
  • Substitution of chemicals[3]

Sensor edge cloud systems

  • CO₂ Bilanz von Sensoren-Module-Systeme[6]

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Data sets: 1 Hits

Optimization of NF3 chamber cleaning of a PECVD system
Further databases
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